| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus which dispenses with the time required for identifying a defective point when an interlock occurs, for improved maintainability.SOLUTION: The semiconductor manufacturing apparatus includes a plurality of overtemperature prevention switches which cut off supply of power to a piping heater if the temperature of the piping reaches an overtemperature because of overheating of the piping caused by the piping heater. When the plurality of overtemperature prevention switches are actuated to cut off power supply, it is displayed which of the plurality of overtemperature prevention switches has cut off power supply. |
