发明名称 METHOD FOR FORMING INTEGRATED CIRCUIT STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a back interconnect structure of an integrated circuit and a method of manufacturing the same.SOLUTION: The method for forming the integrated circuit structure includes a step to provide a semiconductor wafer containing a first notch extending from an edge of the semiconductor into the inside of the semiconductor wafer, and a step to dispose a carrier wafer containing a second notch on the semiconductor wafer. In the step to dispose the carrier wafer, at least a part of the first notch is superposed on at least a part of the second notch.
申请公布号 JP2011009750(A) 申请公布日期 2011.01.13
申请号 JP20100145180 申请日期 2010.06.25
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD 发明人 HUANG HON-LIN;HSIAO CHIN-WEN;HSU KUO-CHING;CHEN CHEN-SHIEN
分类号 H01L21/02;H01L21/3205;H01L21/683;H01L23/12;H01L23/52;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/02
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