发明名称 WEB PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a web processing device which can perform positioning with high accuracy and paste a pair of substrates, using a film substrate of a web.SOLUTION: The web processing device has a feed mechanism 1 that feeds out the web 90; a web-conveying mechanism 2 that conveys the web 90 fed out by the feeding mechanism 1; a vacuum chamber 3 that closes, while sandwiching the conveyed web 90, a flat stage 9 that sucks and fixes the web 90 in the vacuum chamber 3; and a positioning mechanism 5 that detects a pattern 11 for performing positioning provided at the web 90 to perform positioning of the web 90 to the flat stage 4, and when the positioning mechanism 5 performs positioning, a face 4a of the flat stage 4 and faces 3a1 and 3b1 that are used by the vacuum chamber 3 to sandwich the web 90 are made the same plane as a conveying face L of the web 90.
申请公布号 JP2011007968(A) 申请公布日期 2011.01.13
申请号 JP20090150425 申请日期 2009.06.25
申请人 KURARAY CO LTD;SUMITOMO CHEMICAL CO LTD;SUMITOMO BAKELITE CO LTD;TOPPAN PRINTING CO LTD 发明人 EGUCHI TOSHIMASA
分类号 G02F1/13;G02F1/1333;G02F1/1339 主分类号 G02F1/13
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