| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a surface acoustic wave device which forms a plurality of surface acoustic wave filters on the same piezoelectric substrate with favorable precision, and can improve characteristics.SOLUTION: The manufacturing method of the surface acoustic wave device is provided with: a process to form a first metal film 4 on the piezoelectric substrate 2, a process to form a first IDT (Inter Digital Transducer) 8 from the first metal film 4 on the piezoelectric substrate 2 by dry-etching the first metal film 4, a process to form a resist film 10 on the first IDT 8, a process to form a second metal film 12 which is different at least in film thickness or material from the first metal film 4 on the resist film 10 and on the piezoelectric substrate 2, and a process to form a second IDT 16 from the second metal film 12 on the piezoelectric substrate 2 by dry-etching the second metal film 12. |
