| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection device for inspecting surely and efficiently a shape defect of a fine pattern in a color filter having the risk of bringing an unfavorable influence on display coming up widely by generating a plurality of small-sized defects in adjacent positions.SOLUTION: This method of for inspecting the defect of the color filter determines the shape defect using comprehensively the first inspection result (4) executed in the whole effective area as an object, based on the first inspection reference (2), and the second inspection result (12) executed based on the second inspection reference (10) set with a defect detection ability higher than that of the first inspection reference (2), while limiting an inspection area in the vicinity of partial points out of the points detected as candidates by the first inspection result (4). |
