发明名称 GAS ANALYZING DEVICE, AND METHOD FOR CONTROLLING PRESSURE OR FLOW RATE OF GAS CELL USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a gas analyzing device which can control even if the flow rate of a gas cell while controlling the pressure in the gas cell.SOLUTION: The gas analyzing device includes: the gas cell 5 for allowing measuring target gas 1 to flow; an infrared ray source for irradiating the measuring target gas with infrared rays, an intensity detection means for detecting the intensity of the light transmitted through the gas cell; a pressure detection means 4 for detecting the pressure in the gas cell, the first pump 3 arranged on the upstream side of the gas cell; the second pump 9 arranged on the downstream side of the gas cell; the first valve 2 arranged on the upstream side of the gas cell; the second valve 8 arranged on the downstream side of the gas cell; and the gas line 7 connecting the gas suction port of the second valve and the downstream side of the second pump. The pressure in the gas cell is controlled on the basis of the pressure detected by the pressure detection means.
申请公布号 JP2011007534(A) 申请公布日期 2011.01.13
申请号 JP20090149167 申请日期 2009.06.23
申请人 IWATA DENGYO KK 发明人 IWATA TSUNEO
分类号 G01N1/00;G01N21/35;G01N21/3504 主分类号 G01N1/00
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