发明名称 MAGNETRON ASSEMBLY
摘要 A rotating magnetron assembly having a structure to reduce bearing degradation by substantially preventing the flow of current through the bearing using non-conductive materials or providing a low resistance current flow path or by allowing current to flow through the bearing in a way which prevents arcing between the various bearing components.
申请公布号 US2011005926(A1) 申请公布日期 2011.01.13
申请号 US20090511746 申请日期 2009.07.29
申请人 APPLIED MATERIALS, INC. 发明人 MATUSKA NEAL W.;ANDERSON JOEL T.;TAYLOR CLIFFORD L.;GERMAN JOHN R.
分类号 C23C14/35 主分类号 C23C14/35
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