发明名称 |
METHOD FOR A BIN RATIO FORECAST AT NEW TAPE OUT STAGE |
摘要 |
A method for providing a bin ratio forecast at an early stage of integrated circuit device manufacturing processes is disclosed. The method comprises collecting historical data from one or more processed wafer lots; collect measurement data from one or more skew wafer lots; generating an estimated baseline distribution from the collected historical data and collected measurement data; generating an estimated performance distribution based on one or more specified parameters and the generated estimated baseline distribution; determining a bin ratio forecast by applying a bin definition and a yield degradation factor estimation to the generated estimated performance distribution; determining one or more production targets based on the bin ratio forecast; and processing one or more wafers based on the one or more determined production targets.
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申请公布号 |
US2011010215(A1) |
申请公布日期 |
2011.01.13 |
申请号 |
US20090499345 |
申请日期 |
2009.07.08 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIN CHUN-HSIEN;TSEN ANDY;CHEN JUI-LONG;WU SUNNY;MOU JONG-I;HUANG CHIA-HUNG |
分类号 |
G06Q10/00;G06F17/18 |
主分类号 |
G06Q10/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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