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发明名称
SLURRY COMPOSITION
摘要
본 발명은 연마입자; 및 질화막 연마억제제;를 포함하는, 슬러리 조성물에 관한 것으로서, 본 발명의 슬러리 조성물은, 질화막 연마억제제를 포함함으로써 산화막, 금속막 연마율에는 영향을 미치지 않으면서 질화막의 연마를 효과적으로 억제할 수 있으며, 이로 인하여 관통 실리콘 비아(through silicon via; TSV) 웨이퍼를 연마하기 위한 높은 산화막/질화막 선택비 구현이 가능하다.
申请公布号
KR101656421(B1)
申请公布日期
2016.09.12
申请号
KR20140138106
申请日期
2014.10.14
申请人
주식회사 케이씨텍
发明人
이재학;황진숙;박광수;박한터;이혜희
分类号
C09K3/14;H01L21/304
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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