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发明名称
Semiconductor device fabrication method
摘要
申请公布号
EP1708253(B1)
申请公布日期
2011.01.12
申请号
EP20050256287
申请日期
2005.10.10
申请人
FUJITSU LIMITED
发明人
MAKIYAMA, KOZO
分类号
H01L21/027;H01L21/335
主分类号
H01L21/027
代理机构
代理人
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