PIEZOELECTRIC MICRO-BLOWER

摘要

An object is to provide a piezoelectric micro-blower capable of efficiently conveying compressive fluid without use of a check valve and ensuring a sufficient flow rate. A blower body 1 has a first wall 1a and a second wall 1b. Openings 5a and 5b are formed in parts of the respective walls, the parts facing a center of a diaphragm 50. An inflow path 7 allowing the openings 5a and 5b to communicate with the outside is formed between the walls. By applying a voltage to a piezoelectric element 3 to cause the diaphragm 50 to vibrate, a part of the first wall 1a vibrates, the part being close to the first opening 5a. Thus, gas can be drawn from the inflow path 7 and discharged from the opening 5b.