| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser irradiation device capable of excellently making a light intensity distribution uniform even if laser light emitted by a laser light source has high coherence. <P>SOLUTION: The laser irradiation device has a hold base which holds a work, a 1st laser light source which emits a continuous wave laser light, a 2nd laser light source which emits a continuous wave laser light, and a diffracting optical element on which the laser lights emitted by the 1st and 2nd laser light sources are incident. The diffracting optical element at least either shapes the beam cross section of a laser light incident on the diffraction optical element long in one direction on an imaging surface of the diffracting optical element, or makes the light intensity distribution in the beam cross section on the imaging surface of a laser light projected from the diffracting optical element uniform to approximate the light intensity distribution in the beam cross section of the laser light incident on the diffracting optical element. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
