发明名称 Elastic wave device and method of producing the same
摘要 An elastic wave device has a structure that prevents cracks from being formed in a piezoelectric substrate in flip-chip bonding using a bump, that minimizes the contact resistance in a contact portion where wiring patterns are electrically connected to each other, and that improves the insertion loss. In the elastic wave device, first and second multilayer electrically conductive films are provided on a piezoelectric substrate, the first multilayer electrically conductive film defines an IDT electrode and a first wiring pattern, the second multilayer electrically conductive film defines an electrode pad to which a bump is connected and a second wiring pattern, at least one contact portion where the second wiring pattern is overlapped on the first wiring pattern so as to be electrically connected to each other is provided, a top electrically conductive film of the first multilayer electrically conductive film is a Ti film, and a bottom electrically conductive film of the second multilayer electrically conductive film is an Al-based electrically conductive film including Al or an alloy mainly containing an Al.
申请公布号 US7868523(B2) 申请公布日期 2011.01.11
申请号 US20100696080 申请日期 2010.01.29
申请人 MURATA MANUFACTURING CO., LTD. 发明人 TANAKA NOBUHIRA;YAMAZAKI HISASHI
分类号 H01L41/08;H01L41/047;H01L41/053;H03H9/25 主分类号 H01L41/08
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