| 摘要 |
PURPOSE: A substrate aligning apparatus is provided to implement the simplification of substrate position aligning operation and miniaturization of device by comprising a linking unit allowing push arms to automatically ascend or descend. CONSTITUTION: A substrate(G) is placed on a stage(2). A push arm(4) is arranged in order to push the external circumference of the substrate located on the stage. A transfer unit(6) generates the power for moving the push arms forth and back. A linking unit(8) is formed to ascend or descend by the operation of link part as the push arms move forth and back.
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