发明名称 |
System and method comprising same for measurement and/or analysis of particles in gas stream |
摘要 |
A system and method for measuring and analyzing particles within a gas feed stream. In one aspect, the system includes a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system includes a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.
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申请公布号 |
US7867779(B2) |
申请公布日期 |
2011.01.11 |
申请号 |
US20060340641 |
申请日期 |
2006.01.27 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
MCDERMOTT WAYNE THOMAS;OCKOVIC RICHARD CARL;ROTH DEAN VAN-JOHN |
分类号 |
G01N1/22 |
主分类号 |
G01N1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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