| 摘要 |
PURPOSE: A retainer capable of preventing a wafer from becoming contaminated for a second time and a wafer conveying box using the same are provided to prevent the concentration of cleaning liquid on the bottom of a slot part after cleaning the wafer by forming a through hole on the bottom of the slot part. CONSTITUTION: A plurality of slot parts(131) respectively accepts a plurality of wafers. The slot part comprises a sidewall part(132) prepared by being spaced from the wafer, a support unit(133) supporting the wafer from the bottom, and a bottom unit(134).
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