| 摘要 |
PROBLEM TO BE SOLVED: To efficiently inspect only the original flaw by obtaining the plan data of a substrate or the images of a plurality of substrates manufactured on the basis of the same plan and removing false flaw data from detected flaw data.SOLUTION: The coordinates of flaw data Pn are obtained (step S301), the coordinates of false flaw data Qm are obtained (step S302) and the distance D between the flaw data Pn and the false flaw data Qm is obtained (step S303). When the distance D is a false flaw determining distance threshold value or below, a flaw Pn is determined to be a false flaw (step S304) and the flaw data Pn determined to be the false flaw is excepted from the flaw data Pn (step S305). The processing for excepting the flaw data determined to be the false flaw is executed as a round robin with respect to all of the flaw data and all of the false flaw data to except the false flaw data. |
