| 摘要 |
A hybrid nozzle (50) for use in a plasma spray gun (8), especially for plasma spraying silicon to form semiconductor devices such as solar cell. The outlet of the gun includes a two-piece annular electrode against which the plasma is ignited and through which the plasma plume exits the gun together with entrained silicon. In one embodiment, the upstream part (16) is composed of graphite to allow ignition of the plasma and the downstream part (52) is composed of pure silicon. In another aspect, the silicon feedstock is injected into the plasma plume through ports (56) formed through the silicon part. |
