SEALING FILM FOR ORGANIC EL ELEMENT, ORGANIC EL ELEMENT, AND ORGANIC EL DISPLAY

摘要

Disclosed is a sealing film for an organic EL element that has excellent moisture barrier properties by virtue of the absence of pinholes.  The sealing film has a laminate structure of at least three layers in which a silicon nitride film and a silicon oxynitride film are alternately stacked.  The sealing film is characterized in that odd-numbered layers as counted from an organic EL element side are a silicon nitride film having a thickness (T1) of not less than 200 nm and even-numbered layers as counted from the organic EL element side are a silicon oxynitride film having a thickness (T2) of 20 to 50 nm.