| 摘要 |
PROBLEM TO BE SOLVED: To provide a triaxial acceleration sensor having satisfactory characteristics and for adjusting acceleration sensitivity in the directions of an X-axis, a Y-axis, and a Z-axis while reducing the occurrence of offsets.SOLUTION: Piezo-resistance elements x1-x4, y1-y4, and z1-z4 for detection acceleration in the directions of the X-axis, the Y-axis, and the Z-axis are formed over the longitudinal directions of beams 14a, 14b, 14c, 14d. In addition to this, piezo-resistance elements 21-24 for sensitivity adjustment are formed over direction intersecting approximately at right angles with the longitudinal directions of the beams 14a and 14c. The piezo-resistance elements 21-24 for sensitivity adjustment are electrically connected to the piezoelectric elements x1-x4 for acceleration detection. |
