| 摘要 |
PROBLEM TO BE SOLVED: To provide a device having a plurality of probes that enable electrical measurements and electronic microscope observation of an electronic microscope sample at a selective site, at the same time, while in particular, using lighter mechanisms for independently moving the plurality of probes in an electronic microscope having a limited region around the sample even when a vacuum holding space is narrower.SOLUTION: This sample holder for holding the sample includes the plurality of probes for contacting the sample, fine motion mechanisms for moving the plurality of probes, and a driver connected to the fine motion mechanisms. The plurality of fine motion mechanisms independently make the plurality of probes move, and the driver moves the plurality of probes, at the same time. |
