CLEANING METHOD OF MEMBER, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND CLEANING LIQUID

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method of a member which is used for immersion exposure and is in contact with liquid, and to provide a cleaning liquid which is used for cleaning the member.SOLUTION: The cleaning method includes steps for: cleaning the member which is in contact with an immersion liquid with an alkaline solution, and then cleaning the member with a solution containing a buffered hydrofluoric acid and a hydrogen peroxide.