MIRROR ACTUATOR AND BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mirror actuator in which friction and unnecessary braking force of a rotary shaft are suppressed and the rotating performance of a mirror is improved, and to provide a beam irradiation device equipped with the mirror actuator.SOLUTION: The mirror actuator 100 includes: a magnet unit 130; a pivot 111 which is fixed on the magnet unit 130; a tilt unit 110 which is rotatively journalled on the pivot 111; a pivot 125 which is fixed on the tilt unit 110 and vertical to the pivot 111; a pan unit 120 which is rotatively journalled on the pivot 125; and the mirror 140 mounted on the pan unit 120. The tilt unit 110 and the pan unit 120 have a bearing section 112 and a bearing section 122 which bear the pivot 111 and the pivot 125 at one location, respectively.