发明名称 LITHOGRAPHIC APPARATUS AND METHOD
摘要 A drive system for controllably driving an electric actuator includes a current sensor system to sense a current conducted by the actuator and a driver to electrically drive the actuator based on an output signal of the current sensor system. The current sensor system includes at least a first and a second %forwardcurrent sensor that have a mutually different sensitivity for the current to be sensed and the drive system includes a current sensor controller to control an extent to which each of the current sensors to determine the output signal of the current sensor system.
申请公布号 US2011001951(A1) 申请公布日期 2011.01.06
申请号 US20090920799 申请日期 2009.03.02
申请人 ASML NETHERLANDS B.V. 发明人 BUTLER HANS
分类号 G03B27/54;G05B11/06 主分类号 G03B27/54
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