发明名称 SYSTEM FOR IMAGING AN OBJECT
摘要 A device (100) for imaging an object (101), wherein the device (100) comprises an objective lens (102) adapted to manipulate a beam of electromagnetic radiation (103) transmitted through the object (101), a collimator lens (104) adapted to manipulate the beam of electromagnetic radiation (103) transmitted through the objective lens (102), and an actuator (105) adapted for displacing the objective lens (102) in a direction essentially parallel and in a direction essentially perpendicular to a propagation direction of the beam of electromagnetic radiation (103) between the objective lens (102) and the collimator lens (104), wherein the objective lens (102) and the collimator lens (104) are arranged so that the beam of electromagnetic radiation (103) between the objective lens (102) and the collimator lens (104) is essentially parallel.
申请公布号 US2011001036(A1) 申请公布日期 2011.01.06
申请号 US20070446462 申请日期 2007.10.15
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 STALLINGA SJOERD;VOSSEN DIRK LEO JOEP;BRAUN AUGUSTINUS;HENDRIKS BERNARDUS HENDRIKUS WILHELMUS
分类号 H01L27/00;G02B7/02;G02B27/12;G02B27/30;G21K1/02 主分类号 H01L27/00
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