| 摘要 |
PROBLEM TO BE SOLVED: To provide a control system for adjusting a stop/suction valve so as to precisely distribute fluid.SOLUTION: First and second flow limiting devices 20 and 21 have first and second air outlets, respectively fluid-communicated with a stop part and a suction part of the stop/suction valve 10. First and second pressure sensors 24 and 25 sense the pressure inside a first air outlet and the pressure inside a second air outlet. A computer processor 30, respectively independently controls the pressure of the first and the second air outlets, in response to the first and the second pressure sensors. The pressure of the first and the second air outlets is maintained over a predetermined time so that the stoppage part and the absorption part of the stop/suction valve are respectively maintained at a prescribed opening position, and the pressure of the first and second air outlets is controlled respectively independently so that the stoppage part and the absorption part of the stop/suction valve are respectively maintained in a predetermined closing position over a predetermined time. |
