TEST DEVICE OF SEMICONDUCTOR INTEGRATED CIRCUIT, TEST METHOD, AND SEMICONDUCTOR INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide a test device for testing a semiconductor integrated circuit in a short time without applying excessive stress.SOLUTION: The test device 1 of the semiconductor integrated circuit 10 testing the semiconductor integrated circuit 10 by applying a voltage to a semiconductor element of the semiconductor integrated circuit 10 includes a voltage application part 2, a breakdown detection part 3, and a test voltage determination part 4. The voltage application part applies the voltage previously determined on a breakdown measurement circuit element 11 provided in the semiconductor integrated circuit and for measuring a test voltage applied to the semiconductor element. The breakdown detection part 3 detects the breakdown of the breakdown measurement circuit element 11 and the test voltage determination part 4 determines the voltage as the test voltage.