| 摘要 |
PROBLEM TO BE SOLVED: To form an organic EL layer of a pixel on an organic EL display device by a transcription method using a laser beam.SOLUTION: The laser beam 41 emitted from a laser light source 40 is reflected with a galvano-mirror 43 by passing through a dichroic mirror 42, and is incident to a parabola mirror 50. Since the galvano-mirror 43 is installed at a focal point of the parabola mirror 50, the laser beam 41 reflecting the parabola mirror 50 passes through a glass window 61 of the vacuum chamber 60, and is incident at a right angle to a material plate 30 installed in the vacuum chamber 60 and preparing an organic EL material. The organic EL material prepared to the material plate 30 is transcribed to an element substrate 10 by being heated and vaporized with the laser beam 41. Accurate transcription of the organic EL material can be attained since the laser beam 41 is always incident to the material plate 30 at a right angle. |
