发明名称 SEMICONDUCTOR DEVICE AND PROCESS FOR MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To solve the problem that the driving force of a semiconductor device having a relatively high threshold voltage is lowered, when an impurity concentration in a channel region for the semiconductor device having the relatively high threshold voltage is set higher than that in the channel region for the semiconductor device having a relatively low threshold voltage.SOLUTION: The semiconductor device includes a first transistor and a second transistor. The first transistor includes a first channel region 3a, a first gate insulating film 4a, a first gate electrode 5a and a first extension region 8a. The second transistor has the threshold voltage higher than the first transistor and includes a second channel region 3b, a second gate insulating film 4b, a second gate electrode 5b and a second extension region 8b. The second extension region 8b contains shallow-jujnction-formed impurities, and the junction depth of the second extension region 8b is shallower than that of the first extension region 8a.
申请公布号 JP2011003635(A) 申请公布日期 2011.01.06
申请号 JP20090144106 申请日期 2009.06.17
申请人 PANASONIC CORP 发明人 HIRASE JUNJI
分类号 H01L27/088;H01L21/336;H01L21/8234;H01L29/78 主分类号 H01L27/088
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