发明名称 DISK DRYING DEVICE AND DISK DRYING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a disk drying device which can dry a plurality of disks at the same time in a short period of time by batch processing and which can achieve a small device, and to provide a disk drying method.SOLUTION: By chucking the plurality of the disks arranged along one shaft at the same time around an outer periphery, a space by a central opening of the plurality of the disks can be made inside, and by arranging a plurality of nozzles at the space and by supplying warm water from an inner periphery face side of two sides of each disk to heat each disk with the warm water and rotating the plurality of the disks at the same time, the warm water is moved from an inner periphery to the outer periphery of the disks to discharge the warm water to the outside of the outer periphery using centrifugal force. The discharged warm water flows through a valley groove provided on an inner wall face of a water receiving cover toward a downside of the disks and is discharged to the outside.
申请公布号 JP2011003248(A) 申请公布日期 2011.01.06
申请号 JP20090146118 申请日期 2009.06.19
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 MARUYAMA MAKOTO;RATTRAY BRIAN
分类号 G11B5/84;B08B3/02;B08B3/10;F26B5/08;F26B9/06 主分类号 G11B5/84
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