DIVIDED ANNULAR RIB-SHAPED PLASMA PROCESSING DEVICE

摘要

A plasma flow-derived sediment deposited on an annular rib for droplet capture in a plasma processing device is prevented from falling in a plasma generation unit and causing a short circuit. The annular rib for the droplet capture is divided into a plurality of rib pieces. Thus, from the beginning of the deposition of the sediment on the annular rib due to the aggregation of plasma-flow substances, it is possible to mince the sediment. By mincing the sediment, when a piece of the sediment falls in the plasma generation unit, the piece of the sediment gets into a groove portion provided between a cathode and a wall surface of the plasma generation unit, thereby preventing the electrical short circuit between the cathode and the wall surface.