RESONATOR AND PRODUCTION METHOD THEREOF

摘要

In a resonator using the MEMS technology, accuracy of the electrode shape can be improved, the short circuit between the input and the output can be avoided, and the reliability of the resonator can be improved. A resonator is provided with a substrate (101), an insulation layer (102) which is a sacrificial layer selectively formed on the substrate (101), a beam (103) formed on the substrate (101) with a gap therebetween, a first support portion (104A) formed on the insulation layer (102) by the same material as the beam (103), and an electrode (106) formed to have a gap from the beam (103) for inputting/outputting a signal, wherein in the cross section perpendicular to the longitudinal direction of the beam (103), the cross-sectional area of the beam (103) is substantially equal to the cross-sectional area of the first support portion (104A).