| 摘要 |
PURPOSE: A gas supply unit and a gas supplying apparatus are provided to reduce the width of a flow path by effectively arranging the flow path in the flow path block by using the inside of the flow path block as the flow path. CONSTITUTION: A gas supply unit(11) comprises a flow path block(20) extending and a plurality of on-off valves(50). A plurality of on-off valves is mounted on the top(20a) of the flow path block. The on-off valve is serially arranged along the longitudinal direction of the top. An output port(29) of the purge gas is installed on one end of the top of the flow path block. |
