PRODUCTION METHOD AND PRODUCTION DEVICE FOR SOLAR BATTERY

摘要

When a solar battery configured by laminating a p-type layer, an i-type layer, and a n-type layer in this order is produced, a n-type microcrystalline silicon thin film is formed as a n-type layer under film forming conditions wherein a ratio of the flow rate of a n-type dorpant-containing gas to the flow rate of a silicon-containing gas is 0.03 or less, the ratio of the flow rate of a diluent gas to the flow rate of a silicon-containing gas is 70 or more, and the entire pressure of a material gas is 200 Pa or more.