| 发明名称 |
METHOD AND APPARATUS ALLOWING QUANTITATIVE INVESTIGATIONS OF ORGANIC AND INORGANIC SAMPLE BY DECOUPLING THE SPUTTERING PROCESS FROM THE ANALYSIS PROCESS |
| 摘要 |
A method and an analytical instrument are for quantitative investigations of organic and inorganic samples using the Secondary Ion Mass Spectromy (SIMS) technique. The sputtering process is decoupled from the analysis process.
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| 申请公布号 |
US2011001041(A1) |
申请公布日期 |
2011.01.06 |
| 申请号 |
US20080681583 |
申请日期 |
2008.10.09 |
| 申请人 |
MIGEON HENRI-NOEL;WIRTZ TOM;SLODZIAN GEORGES |
发明人 |
MIGEON HENRI-NOEL;WIRTZ TOM;SLODZIAN GEORGES |
| 分类号 |
H01J49/26;G01N23/00;G01N23/223;G01N23/225 |
主分类号 |
H01J49/26 |
| 代理机构 |
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