发明名称 ELECTROMAGNETIC WAVE MEASUREMENT DEVICE, MEASUREMENT METHOD, PROGRAM, AND RECORDING MEDIUM
摘要 Disclosed is an electromagnetic wave measurement device provided with an electromagnetic wave output unit, an electromagnetic wave detector, a relative position change unit, a delay time recording unit, a phase derivation unit, a delay compensation phase derivation unit, and an image derivation unit. The electromagnetic wave output unit outputs an electromagnetic wave of a frequency of 0.01-100 [THz] to an object to be measured and a housing for housing at least part of the object to be measured. The electromagnetic wave detector detects the electromagnetic wave transmitted through the object to be measured. The relative position change unit changes the relative position of an intersection portion, in which the optical path of the electromagnetic wave transmitted through the object to be measured and the object to be measured intersect each other, with respect to the object to be measured. The delay time recording unit records the delay time of the electromagnetic wave caused by the transmission of the electromagnetic wave through the housing. The phase derivation unit derives the phase in a frequency domain of the electromagnetic wave transmitted through the object to be measured on the basis of the result of the detection by the electromagnetic wave detector. The delay compensation phase derivation unit derives a delay compensation phase obtained by subtracting a value obtained by integrating the delay time with respect to a frequency from the phase. The image derivation unit derives an image of a cross-section of the object to be measured including the intersection portion on the basis of a sinogram which a sinogram derivation unit derives on the basis of the result of the derivation by the delay compensation phase derivation unit.
申请公布号 WO2011001922(A1) 申请公布日期 2011.01.06
申请号 WO2010JP60937 申请日期 2010.06.22
申请人 ADVANTEST CORPORATION;NISHINA, SHIGEKI;IMAMURA, MOTOKI;IRISAWA, AKIYOSHI;YAMASHITA, TOMOYU;KATO, EIJI 发明人 NISHINA, SHIGEKI;IMAMURA, MOTOKI;IRISAWA, AKIYOSHI;YAMASHITA, TOMOYU;KATO, EIJI
分类号 G01N21/17;G01N21/35;G01N21/3563;G01N21/3581 主分类号 G01N21/17
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