OVERLAY VERNIER AND METHOD FOR FORMING THE SAME

摘要

PURPOSE: An overlay vernier and a forming method thereof are provided to efficiently read an overlay by preventing an overlay reading error by preventing the width of the vernier from widening after a slim/etch process which is repeated several times by forming an overlay vernier with a mesa structure. CONSTITUTION: A polygonal main vernier has a plurality of laminated sub layers to form a step shape on both sides. A polygonal sub vernier is formed in the inner side of the main vernier. The main vernier has a polygonal frame type. A first oxide/poly layer(420) has the same width as a photosensitive pattern(410).