MOVABLE BODY APPARATUS AND METHOD OF DRIVING MOVABLE BODY, EXPOSURE APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To drive a movable body with high accuracy.SOLUTION: A drive system drives the movable body based on measurement results of a first measurement system for measuring the position of the movable body in an XY plane and measurement results of a second measurement system for measuring variations in an arm member 71 via a laser interferometer by irradiating a grating RG disposed on one surface in parallel with the XY plane of the movable body WFS with measurement beams from the arm member 71. In this case, the drive system corrects measurement errors due to variations in the arm member included in the measurement results of the first measurement system by the measurement results of the second measurement system.