PROXIMITY ALIGNER, ALIGNMENT METHOD FOR PROXIMITY ALIGNER, AND MANUFACTURING METHOD FOR DISPLAY PANEL BOARD

摘要

PROBLEM TO BE SOLVED: To align a mask with a board at high precision to match a new pattern to a base pattern for precise light exposure.SOLUTION: A proximity aligner includes a plurality of image acquiring devices 51 which acquire images of a plurality of alignment marks formed on a mask 2 and on a base pattern of a substrate 1 to output image signals, and an image processor 50 which processes image signals outputted from each image acquiring device 51 to detect the position of each alignment mark. Optical components 33 and 34 are interposed between the mask 2 and each image acquiring device 51 to change the focus position of each image acquiring device 51 to the level of each alignment mark on the mask 2 or to the level of each alignment mark on the base pattern of the substrate 1. Based on the position of each alignment mark on the mask 2 and the position of each alignment mark on the base pattern of the substrate 1, both positions detected by the image processor 50, a chuck 10 and a mask holder 20 are moved relatively by a stage to align the mask 2 with the substrate 1.