| 摘要 |
PROBLEM TO BE SOLVED: To provide a polysiloxane based positive radiation sensitive composition which can form an interlayer insulation film having superior radiation sensitivity melt flow-proofness, high heat resistance, transparency or the like.SOLUTION: The positive radiation sensitive composition includes [A] siloxane polymer being a hydrolyzable silane compound and/or its hydrolysis condensate, [B] a bissilane compound of structure coupled with a 1C-6C alkylene group, a phenylene group and 1, 4-dialkyl phenylene group, and [C] a quinonediazide compound. |
