| 摘要 |
PROBLEM TO BE SOLVED: To provide a wavelength locker integrated type semiconductor laser element which enables a module to be further downsized.SOLUTION: The semiconductor laser element 1A is equipped with a semiconductor laser region 10 and a wavelength monitor region 20, which are provided side by side on a semiconductor substrate 3. The semiconductor laser region 10 has a first optical waveguide including a gain waveguide, and a pair of films 137a, 137b forming a reflection end surface of the first optical waveguide by crossing an optical axis of the first optical waveguide. The wavelength monitor region 20 has an optical waveguide 21 optically coupled to the first optical waveguide via the pair of films 137a, 137b. The optical waveguide 21 is branched into three optical waveguides 211-213, and the two optical waveguides 211, 213 form ring resonators having different repetition cycles of wavelength-transmissivity characteristic, respectively. The optical waveguides 211-213 are optically coupled to the three photodiode structures 22, respectively. |
