METAL NANOPARTICLE CATALYST SUPPORTED ON SILICON OXIDE NANOWIRE AND A FABRICATION METHOD THEREOF

摘要

PURPOSE: A metal nanoparticle catalyst supported by a silicon oxide nanowire, and a producing method thereof are provided to improve the catalytic effect by dispersing the metal nanoparticle catalyst on the surface of the silicon oxide nanowire with the high density. CONSTITUTION: A producing method of a metal nanoparticle catalyst supported by a silicon oxide nanowire comprises the following steps: depositing a metal nanoparticle on the surface of the silicon oxide nanowire using a physical vapor deposition method; and heat-treating the silicon oxide nanowire. The deposition process is performed by a method selected from the group consisting of a sputtering method, an E-beam evaporation method, a thermal evaporation method, a laser molecular beam epitaxy method, and a pulsed laser deposition method.