| 摘要 |
PROBLEM TO BE SOLVED: To provide an SEM type visual inspection device capable of setting flexibly the scanning method and its image signal processing method.SOLUTION: The SEM type visual inspection device utilizes a concept of a scanning set 101 in which a plurality of scanning are handled as one unit of scanning. In the scanning set 101, a plurality of scanning are defined, for example, by the number of scanning lines "4" and the distance between the scanning lines "2". When information of the scanning set 101 is defined, a scanning control part of the SEM type visual inspection device carries out a scanning control to perform scanning of the scanning lines for the number of scanning lines "4" for every distance between the scanning lines "2" from the scanning line of a reference position address, based on the information of that scanning set 101. Further, when the scanning as defined by the scanning set 101 is completed, the scanning control part continues the scanning control by the same scanning set 101 while incrementing one by one the reference position address. |
