发明名称 BENDING FIXTURE FOR HOMOGENOUS AND SMOOTH OPERATION OF AN EVAPORATION SOURCE
摘要 An evaporation apparatus for coating a substrate having an evaporation structure for evaporating material, the evaporation structure having an evaporation structure surface for receiving a wire; a wire feed for providing the wire; and a bending fixture with the bending fixture including a first and a second roller for giving the wire a reproducible curvature so that in operation of the evaporation apparatus the contact spot of the wire on the evaporation structure is at a desired position.
申请公布号 US2011003072(A1) 申请公布日期 2011.01.06
申请号 US20090500439 申请日期 2009.07.09
申请人 APPLIED MATERIALS, INC. 发明人 KELLER STEFAN;BRUCH JUERGEN;KLEMM GUENTER;KEIM KARL-ALBERT;HEIN STEFAN
分类号 B05D5/06;C23C14/22 主分类号 B05D5/06
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