RADIAL ANTENNA, AND PLASMA PROCESSING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve uniformity of plasma without sacrificing plasma generation efficiency and without causing excessive heat generation.SOLUTION: A radial antenna includes a plurality of conductive partition plates 37 which are arranged radially in plan view in a radial waveguide 33 formed of first and second conductive plates 31 and 32, and extend between the first conductive plate 31 and the second conductive plate 32.