| 摘要 |
PROBLEM TO BE SOLVED: To sharply improve process processing capability as a whole by suppressing accumulation of an object to be processed in a stand-by state for process processing on the downstream side of the process processing.SOLUTION: The start of each process processing to an object to be processed is controlled so that the number of non-processing of the process processing on the downstream side can be prevented from exceeding the number of non-processing of the process processing at an upstream side. The process processing control device is provided with a counting section 5 for counting the number of non-processing about each process processing; and a processing start command section 7, when it is determined that the number of non-processing of the process processing on the downstream side is smaller than the number of non-processing of the process processing on the upper stream side of the process processing, by only one based on the count of the counting section, determining that the process processing at the upstream side can be started for the object to be processed, and for outputting a start signal indicating the result. |
