| 摘要 |
PROBLEM TO BE SOLVED: To test mechanical excitation without any electrical contact in the initial manufacturing process.SOLUTION: In a method for exciting a resonance element (14) of a microstructure, the element moves with one degree of freedom. The method includes the process of applying a charged particle beam (51) to the microstructure, and the beam is constructed to operate the element in an alternate movement manner, depending on the degree of freedom of the element. In one version, the particle beam is applied to the element at an incident angle having a component parallel to the degree of freedom. |
