发明名称 |
MONOLITHIC VACUUM MANOMETER UTILIZING ELECTROSTATIC INTERFERENCE AS A MEANS OF DETECTION |
摘要 |
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.
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申请公布号 |
US2011000303(A1) |
申请公布日期 |
2011.01.06 |
申请号 |
US20100827531 |
申请日期 |
2010.06.30 |
申请人 |
FORTNER MICHAEL W;SIPKA JOSEPH;REED CHRISTOPHER |
发明人 |
FORTNER MICHAEL W.;SIPKA JOSEPH;REED CHRISTOPHER |
分类号 |
G01L9/12;H05K13/00 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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