发明名称 MAGNETIC SYSTEM FORMING CLOSED ISOMODULE SURFACES FROM CUSP MAGNETIC STRUCTURES, AND ECR ION SOURCES IMPLEMENTING SUCH A SYSTEM
摘要 The invention relates to a device for generating a magnetic field so as to be able to create closed isomodule surfaces and to do so in the context of planar symmetry and cusp magnetic structures. The invention also relates to an ECR (Electron Cyclotron Resonance) ion source implementing such a device (M1 and M2) comprising a means for injecting a microwave (B1), a means for injecting gas (B2, B3), a high-voltage-polarised plasma electrode (B6), and a mass-polarised extracting electrode (B7), so as to form an ion beam (B5) which can then be used to treat parts.
申请公布号 WO2011001051(A1) 申请公布日期 2011.01.06
申请号 WO2010FR00517 申请日期 2010.07.12
申请人 QUERTECH INGENIERIE;BUSARDO, DENIS;PIERRET, CHRISTOPHE 发明人 BUSARDO, DENIS;PIERRET, CHRISTOPHE
分类号 H01J27/18 主分类号 H01J27/18
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