APPARATUS AND METHOD FOR MEASUREMENT OF TRANSVERSE PIEZOELECTRIC COEFFICIENT OF PIEZOELECTRIC THIN FILMS BY MEASUREMENT OF QUANTITY OF ELECTRIC CHARGE

摘要

PURPOSE: An apparatus and a method for the measurement of the transverse piezoelectric property of a piezoelectric thin film by the measurement of electric charge are provided to precisely and reliably measure the piezoelectric constant of a piezoelectric thin film by employing tension for a load application instead of bending. CONSTITUTION: An apparatus for the measurement of the transverse piezoelectric property of a piezoelectric thin film by the measurement of electric charge comprises a tension driving unit(120), a tensile load measuring unit(122), a strain measuring unit(132), an electric charge measuring unit(142) and a piezoelectric constant output unit(151). The tension driving unit applies a tensile load to a specimen(20) including a piezoelectric thin film. The tensile load measuring unit is connected to the tension driving unit and measures the tensile load exerted on the specimen. The strain measuring unit measures the strain of the specimen. The electric charge measuring unit measures the amount of electric charge created in the piezoelectric thin film. The piezoelectric constant output unit computes the traverse piezoelectric constant from the strain measured by the strain measuring unit.